Sub-angstrom surface roughness metrology with the white light interferometer"

Shawn Iles and Jayson Nelson

SPIE

11/15/2019 5:00:00 AM

https://www.spiedigitallibrary.org/conference-proceedings-of-spie/11175/1117519/Sub-angstrom-surface-roughness-metrology-with-the-white-light-interferometer/10.1117/12.2536683.full